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全國聯邦規格(Fed.Std.209E)等級分類表 |
| |
| Cleanliness class |
Maximum numbers of particles |
| 0.1μm |
0.2μm |
0.3μm |
0.5μm |
5μm |
| Unit volume |
Unit volume |
Unit volume |
Unit volume |
Unit volume |
| Metric |
fps |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
| system |
system |
| M1 |
|
350 |
9.91 |
75.7 |
2.14 |
30.9 |
0.875 |
10 |
0.283 |
... ... |
... ... |
| M1.5 |
1 |
1,240 |
35 |
265 |
7.5 |
106 |
3 |
35.3 |
1 |
... ... |
... ... |
| M2 |
|
3,500 |
99.1 |
757 |
21.4 |
309 |
8.75 |
100 |
2.83 |
... ... |
... ... |
| M2.5 |
10 |
12,400 |
350 |
2,650 |
75 |
1,060 |
30 |
353 |
10 |
... ... |
... ... |
| M3 |
|
35,000 |
991 |
7,570 |
214 |
3,090 |
87.5 |
1,000 |
28.3 |
... ... |
... ... |
| M3.5 |
100 |
... ... |
... ... |
36,500 |
750 |
10,600 |
300 |
3,530 |
100 |
... ... |
... ... |
| M4 |
|
... ... |
... ... |
75,700 |
2,140 |
30,900 |
875 |
10,000 |
283 |
... ... |
... ... |
| M4.5 |
1000 |
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
35,300 |
1,000 |
247 |
7 |
| M5 |
|
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
100,000 |
2,830 |
618 |
17.5 |
| M5.5 |
10000 |
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
353,000 |
10,000 |
2,470 |
70 |
| M6 |
|
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
1,000,000 |
28,300 |
6,180 |
175 |
| M6.5 |
100000 |
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
3,530,000 |
100,000 |
24,700 |
700 |
| M7 |
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
10,000,000 |
283,000 |
61,800 |
1,750 |
|
|
|
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ISO/TC209 (ISO 14644-1) 潔淨標準 |
| |
| 等級 |
微塵粒限制(顆/m3) |
| Class |
0.1μm |
0.2μm |
0.3μm |
0.5μm |
1.0μm |
| ISO 9 |
- |
- |
- |
35,200,000 |
293,000 |
| ISO 8 |
- |
- |
- |
3,520,000 |
29,300 |
| ISO 7 |
- |
- |
- |
352,000 |
2,930 |
| ISO 6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
293 |
| ISO 5 |
100,000 |
23,700 |
10,200 |
3,520 |
29 |
| ISO 4 |
10,000 |
2,370 |
1,020 |
352 |
0 |
| ISO 3 |
1,000 |
237 |
102 |
35 |
0 |
| ISO 2 |
100 |
24 |
10 |
4 |
0 |
| ISO 1 |
10 |
2 |
0 |
0 |
0 |
|
|
|
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ISO/TC209 與 Fed.Std.209E之比較 |
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| ISO/ |
Fed.Std.209E |
微塵粒限制 |
| TC209 |
| Class |
英制 |
SI制 |
0.1μm |
0.5μm粒徑 |
| |
Class |
Class |
顆/m3 |
顆/m3 |
顆/m3 |
| ISO 9 |
- |
- |
- |
- |
- |
| ISO 8 |
100,000 |
M6.5 |
- |
100,000 |
3,520,000 |
| ISO 7 |
10,000 |
M5.5 |
102,000 |
10,000 |
352,000 |
| ISO 6 |
1,000 |
M4.5 |
10,200 |
1,000 |
35,200 |
| ISO 5 |
100 |
M3.5 |
1,020 |
100 |
3520 |
| ISO 4 |
10 |
M2.5 |
102 |
10 |
352 |
| ISO 3 |
1 |
M1.5 |
10 |
1 |
34 |
| ISO 2 |
- |
- |
0 |
0 |
0 |
| ISO 1 |
- |
- |
- |
0 |
0 |
|
|
|
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無塵室(ICR)無菌室(BCR)的環境狀況 |
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| 國聯邦規範邦209B |
等級 |
微粒子(ICR) |
生物粒子(BCR) |
照度 |
相對濕度 |
| 大小(μm) |
(個/ft3) |
個/ |
浮遊量(個/) |
沈降量(個/m3週) |
LUX |
% RH |
| 100 |
0.5以上 |
100以下 |
3.5以下 |
0.0035以下 |
12,900以下 |
1080 |
45~40 |
| 10000 |
0.5以上 |
10000以下 |
350以下 |
0.0176以下 |
64,600以上 |
~ |
| 5.0以上 |
65以下 |
2.0以下 |
1620 |
| 100000 |
0.5以上 |
100000以上 |
3500以下 |
0.0884以下 |
323,000以下 |
|
| 5.0以上 |
700以下 |
700以下 |
|
| 新鮮外氣量：送風量之5~20%或30ft3 /min.人數 |
| 壓力mmAq：1.3以上壓差+0.05 |
| 溫度°F/°C：72±5°F或22.2±2.8°C |
| 氣流換氣回數：層流方式0.45m/s±0.1m/s，亂流方式28回/時以上，天花板高8~12呎 |
|
|
風量換算表 |
| |
| CMS |
CMM |
L/s |
L/min |
CMH |
CFS |
CFM |
| 1 |
60 |
1K |
60k |
3.6k |
35.3 |
2.118k |
| 0.0167 |
1 |
16.7 |
1k |
60 |
0.588 |
35.35 |
| 1mili |
0.06 |
1 |
60 |
3.6 |
0.0353 |
2.118 |
| 16.7μ |
1mili |
0.0167 |
1 |
0.06 |
588μ |
0.0353 |
| 277μ |
0.0167 |
0.277 |
16.7 |
1 |
9.81mili |
0.588 |
| 0.0283 |
1.698 |
28.3 |
1.69k |
101.9 |
1 |
60 |
| 0.47mili |
0.0283 |
0.472 |
28.3 |
1.698 |
0.167 |
1 |
| K=1000 ; mili=0.001 ; μ=10^-6=0.000001 |
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空氣過濾器效率規格比較表 |
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