| |
Federal Standard 209E(Fed.Std.209E) |
| |
| Cleanliness class |
Maximum numbers of particles |
| 0.1μm |
0.2μm |
0.3μm |
0.5μm |
5μm |
| Unit volume |
Unit volume |
Unit volume |
Unit volume |
Unit volume |
| Metric |
fps |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
| system |
system |
| M1 |
|
350 |
9.91 |
75.7 |
2.14 |
30.9 |
0.875 |
10 |
0.283 |
... ... |
... ... |
| M1.5 |
1 |
1,240 |
35 |
265 |
7.5 |
106 |
3 |
35.3 |
1 |
... ... |
... ... |
| M2 |
|
3,500 |
99.1 |
757 |
21.4 |
309 |
8.75 |
100 |
2.83 |
... ... |
... ... |
| M2.5 |
10 |
12,400 |
350 |
2,650 |
75 |
1,060 |
30 |
353 |
10 |
... ... |
... ... |
| M3 |
|
35,000 |
991 |
7,570 |
214 |
3,090 |
87.5 |
1,000 |
28.3 |
... ... |
... ... |
| M3.5 |
100 |
... ... |
... ... |
36,500 |
750 |
10,600 |
300 |
3,530 |
100 |
... ... |
... ... |
| M4 |
|
... ... |
... ... |
75,700 |
2,140 |
30,900 |
875 |
10,000 |
283 |
... ... |
... ... |
| M4.5 |
1000 |
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
35,300 |
1,000 |
247 |
7 |
| M5 |
|
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
100,000 |
2,830 |
618 |
17.5 |
| M5.5 |
10000 |
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
353,000 |
10,000 |
2,470 |
70 |
| M6 |
|
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
1,000,000 |
28,300 |
6,180 |
175 |
| M6.5 |
100000 |
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
3,530,000 |
100,000 |
24,700 |
700 |
| M7 |
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
... ... |
10,000,000 |
283,000 |
61,800 |
1,750 |
|
|
|
| |
ISO/TC209 (ISO 14644-1)Cleanliness standards |
| |
|
Maximum numbers of particles (unit/m3) |
| Class |
0.1μm |
0.2μm |
0.3μm |
0.5μm |
1.0μm |
| ISO 9 |
- |
- |
- |
35,200,000 |
293,000 |
| ISO 8 |
- |
- |
- |
3,520,000 |
29,300 |
| ISO 7 |
- |
- |
- |
352,000 |
2,930 |
| ISO 6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
293 |
| ISO 5 |
100,000 |
23,700 |
10,200 |
3,520 |
29 |
| ISO 4 |
10,000 |
2,370 |
1,020 |
352 |
0 |
| ISO 3 |
1,000 |
237 |
102 |
35 |
0 |
| ISO 2 |
100 |
24 |
10 |
4 |
0 |
| ISO 1 |
10 |
2 |
0 |
0 |
0 |
|
|
|
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ISO/TC209 Compare with Fed.Std.209E |
| |
| ISO/ |
Fed.Std.209E |
Maximum numbers of particles |
| TC209 |
| Class |
British |
SI |
0.1μm |
0.5μm |
| |
Class |
Class |
unit/m3 |
unit/m3 |
unit/m3 |
| ISO 9 |
- |
- |
- |
- |
- |
| ISO 8 |
100,000 |
M6.5 |
- |
100,000 |
3,520,000 |
| ISO 7 |
10,000 |
M5.5 |
102,000 |
10,000 |
352,000 |
| ISO 6 |
1,000 |
M4.5 |
10,200 |
1,000 |
35,200 |
| ISO 5 |
100 |
M3.5 |
1,020 |
100 |
3520 |
| ISO 4 |
10 |
M2.5 |
102 |
10 |
352 |
| ISO 3 |
1 |
M1.5 |
10 |
1 |
34 |
| ISO 2 |
- |
- |
0 |
0 |
0 |
| ISO 1 |
- |
- |
- |
0 |
0 |
|
|
|
| |
Industraial Clean Room (ICR) Biological Clean Room (BCR) of the environmental conditions |
| |
| Federal Specification209B |
Class |
Particles(ICR) |
Biological particles(BCR) |
Illumination |
Relative Humidity |
| Size(μm) |
(unit/ft3) |
unit/ |
Floating (unit/)) |
Settlement(unit/m3) |
LUX |
% RH |
| 100 |
0.5 Above |
100Below |
3.5Below |
0.0035Below |
12,900Below |
1080 |
45~40 |
| 10000 |
0.5 Above |
10000Below |
350Below |
0.0176Below |
64,600Above |
~ |
| 5.0Above |
65Below |
2.0Below |
1620 |
| 100000 |
0.5 Above |
100000Above |
3500Below |
0.0884Below |
323,000Below |
|
| 5.0Above |
700Below |
700Below |
|
| Fresh Air Volumn : Air supply of 5 to 20% or 30ft3 / min with number of people |
| Pressure mmAq : 1.3 Above in difference +0.05 |
| Temperature °F/°C : 72 72±5°F or 22.2±2.8°C |
| Air Ventilation : Laminar flow mode 0.45m/s±0.1m/s , turbulence mode 28 times/hr, Ceilings: height 8 to 12 feet |
|
|
Airflow Conversion Table |
| |
| CMS |
CMM |
L/s |
L/min |
CMH |
CFS |
CFM |
| 1 |
60 |
1K |
60k |
3.6k |
35.3 |
2.118k |
| 0.0167 |
1 |
16.7 |
1k |
60 |
0.588 |
35.35 |
| 1mili |
0.06 |
1 |
60 |
3.6 |
0.0353 |
2.118 |
| 16.7μ |
1mili |
0.0167 |
1 |
0.06 |
588μ |
0.0353 |
| 277μ |
0.0167 |
0.277 |
16.7 |
1 |
9.81mili |
0.588 |
| 0.0283 |
1.698 |
28.3 |
1.69k |
101.9 |
1 |
60 |
| 0.47mili |
0.0283 |
0.472 |
28.3 |
1.698 |
0.167 |
1 |
| K=1000 ; mili=0.001 ; μ=10^-6=0.000001 |
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Filter Efficiency and Classifications |
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